
Status of SEMI Standardization Efforts in Compound
2010-8-12 · dimensions and flatness parameters for SiC wafers: SEMI M55- Specifiion for Polished Monocrystalline Silicon Carbide Wafers. Specifiions for 2-inch and 3-inch wafers are included, but 100mm wafer parameters are still in draft form (draft document 3874). The particular values for wafer thickness and tolerance, flatness parameters, and